Ilaria TINNIRELLO
PhD Student
PhD in Chemical Sciences - XXXV cycleTutor: Ignazio Luciano FRAGALA'
Study on effects of surface damage due to dry etch processes in the formation of shallow and deep trench etch in Si and SiC substrates
Study on effects of surface damage due to dry etch processes in the formation of shallow and deep trench etch in Si and SiC substrates